Electrical characteristics of floating electrode MEMS capacitive switches

The present paper investigates in depth the electrical behaviour of floating electrode MEMS switches when their actuation is performed through the transmission line. The study is carried out through modeling and experimentally obtained capacitance- and current-voltage characteristic. It is demonstrated for the first time that constant down state capacitance is achieved without contacting the floating electrode with the moving armature. Moreover the pull-in and pull-out conditions are discussed in details.