Two-port filters and resonators on AlN/3C-SiC plates utilizing high-order Lamb wave modes

A composite plate composed of aluminum nitride (AlN) and cubic silicon carbide (3C-SiC) is a promising mechanical structure that enables high-frequency Lamb wave devices since the 3C-SiC plate can effectively increase coupling of high-order Lamb wave modes and reduce steep phase velocity dispersion simultaneously. In this study, two-port filters and resonators utilizing various Lamb wave modes in the AlN/3C-SiC composite plate are microfabricated on 2.5-μm-thick AlN films deposited on various thicknesses of 3C-SiC layers. Intriguingly, the experimental results show that some Lamb wave modes are suitable for two-port resonator topology whereas some others are applicable for two-port filter topology due to different wave propagation characteristics.