High kt2×Q, multi-frequency lithium niobate resonators

This paper presents design and vacuum measurements of lithium niobate (LN) contour-mode resonators (CMR). By carefully positioning the interdigital transducer (IDT), we achieved CMRs with k
t
²
×Q of 7%∗2150=148 (IDT @ node) or resonators with very high k
t
²
of 12.3% and spur-attenuated response (IDT @ anti-node). In addition, we demonstrated resonators with frequencies ranging from 400MHz to 800MHz on a single chip.