Design of improved microcantilever profile for sensing applications

In the present work, possibility of improving microcantilever profile for better response as compared to existing profile namely triangular, trapezoidal and invert paddle is explored. This is achieved by doing simulations on MEMS CAD tool (Intellisuite). Performance of the microcantilever is measured on the basis of resonant frequency and static deflection under uniform load. By observing the results, a new microcantilever profile is proposed which gives better sensitivity as compared to existing profiles.