A control and readout circuit with capacitive mismatch auto-compensation for MEMS vibratory gyroscope

In this paper, a control and readout circuit for MEMS vibratory gyroscope is described, including closed- loop driving axis and open-loop sensing axis. Capacitive mismatch auto-compensation has been implemented in this system to suppress the influence to the output due to the mismatch of gyroscope capacitors. The ASIC is fabricated in a 0.35um CMOS process. The test of the ASIC is performed with a MEMS vibratory gyroscope. The test result shows that the non-linearity is less than 0.1% within angular velocity range of -300°/s to 300°/s.