Improving cluster tools performance using Colored Petri Nets in semiconductor manifacturing

Semiconductor manufacturing is a capital-extensive industry. How to utilize billions of dollars of equipment as efficiently as possible is a critical factor for a semiconductor manufacturer to succeed in stiff competition. Improving performance of manufacturing process increases overall tool throughput, reduces operating costs, and saves companies millions of dollars. In this study, we develop a methodology to analyze and improve a cluster tool's performance. A Colored Petri Net model is developed to determine internal bottleneck resource of the tool. Results conclude that the methodology improves tool efficiency and provides significant cost savings.