Effect of oxygen ratio to the transparency and conductivity of nanostructured ZnO thin films deposited by RF magnetron sputtering

The effect of oxygen ratio to the transparency and conductivity of nanostructured ZnO thin films deposited by RF magnetron sputtering are investigated. The effect of oxygen ratio at (0∼10 sccm) on the ZnO thin films have been investigated. The I-V measurement specify that at ratio 45: 5 sccm (Ar:O
2
) show the highest conductivity. All films have show high highly transparent in the visible region which (>80 %). The average transmittance in the visible range is 350 nm-1200 nm. The image of nanocolumnar size increase as the insertion of oxygen ratio increase.