High speed Tilted white-light Scanning Interferometry system for package bumps inspection

Tilted white-light Scanning Interferometry(TSI) is oriented from Vertical Scanning white-light interferometry(VSI). TSI is optimized for lateral scanning; it's possible that scanning object with only one axis movement while VSI have to move more than two axis to scan a object lager than its Field Of View(FOV). This paper introduces implemented system for package bumps scanning using TSI with our own developed high speed camera.