Gas spectrometry based on pyroelectric thin film arrays integrated on silicon

We report on a novel gas spectrometry technique using pyroelectric thin film arrays. The 1/spl times/50 element arrays of PZT are integrated onto silicon using a membrane structure. The experimental characterization of the pyroelectric elements show both high voltage and current responses in defined frequency ranges. Mounting the array as a detector in a commercial spectrometer, we demonstrate its capability of detecting the infrared absorption lines of gases by the example of CO/sub 2/.