Laser-assisted nanofabrication in the scanning electron microscope

A prototype apparatus was developed to deliver up to ~300 kW/cm
²
of cw or pulsed near IR light to a sample inside a scanning electron microscope (SEM) or focused ion beam (FIB) instrument. Transient heating of localized areas around the electron or ion beam can be performed with fine control of power and pulse parameters, down to sub-microsecond durations. In conjunction with a gas injection system, electron beam induced deposition (EBID) of enhanced purity Pt and Au structures was demonstrated. Dynamics of pulsed laser induced solid-state dewetting of Ni and Au were also observed in real time in a SEM/FIB, which may lead to improved understanding and manipulation of self-assembled nanostructures.