Characterization of Si nanowires-based piezoresistive pressure sensor by dynamic cycling test

A novel pressure sensor using piezoresistive silicon nanowires (SiNWs) embedded in the suspended multi-layered diaphragm was investigated by a probe-based dynamic cycling test. Even under compressive strain of 1.5% after 3.6×10
⁵
cycles, there is no observed drift and degradation in sensor characteristics.