An 80-Gbit/s multiplexer IC using InAlAs/InGaAs/InP HEMTs

We report on an 80-Gbit/s 2:1 selector-type multiplexer IC using InAlAs/InGaAs/InP HEMTs incorporating a high-speed double layer interconnection process with a low permittivity insulator. The record operating data rate was measured on a 3-inch wafer. In spite of the bandwidth limitation on the measurement setup, clear eye patterns were successfully observed for the first time.