Introducing high performance crystalfree™ pMEMS oscillators

High performance oscillators based on piezoelectrically transduced pMEMS™ resonators are introduced. pMEMS resonators consist of a piezoelectric material (AlN) on a single-crystal silicon layer substrate and typically have a quality factor of more than a few thousand and insertion loss close to -10dB. Plastic packaged pMEMS™ oscillators are immune to shock and vibration of 1500G and 20G, respectively, and have shown excellent long term frequency stability at 25°C, 125°C, -40C and hysteresis testing over -40°C to 125°C. Due to high quality factor and low motional impedance, oscillators based on pMEMS™ resonators can deliver low phase noise well below <;1.0ps for bandwidth from 12kHz to 20MHz.