Monitoring on dry vacuum pump characteristics by mobile device

Dry vacuum pump is a core device in semiconductor and electro-optic industries for vacuum purpose. The pumping characteristics of dry vacuum pump could affect significantly the performance of secondary pump. This article present a method which integrates a mobile device through the remote application program to measure the vacuum pressure, sound, vibration, and power for a dry vacuum pump system. Moreover, the LabVIEW was implemented to the system for pumping experiment control. The pumping characteristics monitored by mobile device can be useful for processing monitor.