Electrode-shaping for the excitation and detection of permitted arbitrary modes in arbitrary geometries in piezoelectric resonators

This paper reports theoretical analysis and experimental results on a numerical electrode shaping design technique that permits the excitation of arbitrary modes in arbitrary geometries for piezoelectric resonators, for those modes permitted to exist by the nonzero piezoelectric coefficients and electrode configuration. The technique directly determines optimal electrode shapes by assessing the local suitability of excitation and detection electrode placement on two-port resonators without the need for iterative numerical techniques. The technique is demonstrated in 61 different electrode designs in lead zirconate titanate (PZT) thin film on silicon RF micro electro-mechanical system (MEMS) plate, beam, ring, and disc resonators for out-of-plane flexural and various contour modes up to 200 MHz. The average squared effective electromechanical coupling factor for the designs was 0.54%, approximately equivalent to the theoretical maximum value of 0.53% for a fully electroded length-extensional mode beam resonator comprised of the same composite. The average improvement in S
₂₁
for the electrode-shaped designs was 14.6 dB with a maximum improvement of 44.3 dB. Through this piezoelectric electrodeshaping technique, 95% of the designs showed a reduction in insertion loss.