Improvement of soft magnetic properties of ferromagnetic Fe-Co-Ta:N/M films multilayered with paramagnetic Ti, Co/sub 67/Cr/sub 33/ and Fe/sub 82/Co/sub 9/Ta/sub 9/:N interlayers

[Fe-Co-Ta:N/paramagnetic layer] multilayers were deposited using a facing targets sputtering apparatus. Soft magnetic properties were optimized by adjusting the N content in paramagnetic interlayers of Ti, Co/sub 67/Cr/sub 33/ Fe/sub 82/Co/sub 9/Ta/sub 9/:N. The addition of a small amount of N atoms into the Ti interlayer was effective in maintaining a relatively high /spl mu//sub r/ even after annealing at 280/spl deg/C. Fe/sub 82/Co/sub 9/Ta/sub 9/:N/Ti-N multilayers revealed soft magnetic properties before and after the annealing process.