Si wires for strain sensor application

Resistance and magnetoresistance of Si microwires were studied in temperature range 4,2-300 K at magnetic fields up to 14 T. Ga-In gates were created to wires and ohmic I-U characteristics were observed in all temperature range. It was found high elastic strain for Si wires, linear thermoresistive characteristics as well as small magnitude of magnetoresistance (of about 5% at 14 T), which was used to design multifunctional sensor of simultaneous measurements of strain and temperature with minimal sensitivity to magnetic field intensity.