Design of 3D integrated inductors for RFICs

This paper discusses the design of 3D monolithic integrated inductors. The proposed 3D radio frequency (RF) integrated inductors have high inductance (L) values with an enhanced quality factors (Q). A new proposed method for 3D integrated inductors design is presented. A wide range of inductances and quality factor values can be realized. The proposed 3D inductors were designed in TSMC 0.18 µm technology and simulated using momentum.