A novel 4 x 8 single-mode independently addressable oxide-isolated VCSEL array

We report a novel process to fabricate single-mode independently addressable oxide-isolated vertical-cavity surface-emitting laser (VCSEL) arrays. The array is fabricated with a novel simple two-mask process where a single oxidation layer is used to define the laser aperture and to isolate the interconnects. The 4/spl times/8 VCSEL array has very uniform electrical, modal and geometrical characteristics that make it ideal for two-dimensional (2-D) array applications.