MIM-based ISFET sensors with CLOSED/OPEN Sense Plates for pH detection

We present electrochemical measurements obtained from chemical sensors that integrate conventional MOSFET devices along with SENSE/RE plates based on MIM (Metal-Insulator-Metal) structures that are all-integrated to the gate oxide of transistors using standard 0.18 μm CMOS fabrication processing. Depending on the CMOS-based materials used as sensing plates for pH detection, different sensitivities to hydrogen ion activities are found and they are all related to the bias conditions of the sensor structure.