Broadband 110 GHz on-wafer interconnects built in CMOS-compatible membrane technology

We present a broadband transition from a contact structure built on highly-conductive silicon to a coplanar waveguide (CPW) fabricated in membrane technology. Test structures were fabricated and measured in a frequency range from 0.1 to 110 GHz. The measured propagation constant of the membrane CPW agrees well with analytical calculations in the entire frequency band.