Autonomous decentralized operations of a stack-integrated sensor/actuator array for 2D planar micro manipulator

In this paper, we present demonstrations of autonomous decentralized MEMS (ADM). The ADM is a large scale array of “monolithically integrated cell”, in which “microactuators” are integrated with a “micro sensor” and a “micro processing unit (MPU)” (Fig.1a). We applied autonomous decentralized algorithms based on “cellular automata” to our developed micro manipulator. This manipulator is not monolithically integrated one but an equivalent system to the ADM by stacking an actuator array on a sensor array (Fig.1b). We could observe smart functions of micro object manipulations.