MEMS switches employing active metal-polymer nanocomposites

This paper presents the design, fabrication, testing and evaluation of a MEMS switch that employs a metal-polymer nanocomposite as its active material. The nanocomposite is formed by doping a polymer with conducting nanoparticles. The conductivity of the nanocomposite changes 10,000-fold as it is mechanically compressed. In this demonstration the compressive squeeze is applied with electric actuation. Since squeezing initiates the switching behavior, the device is referred to as a “squitch”.