Low actuation voltage RF MEMS switch for WiMAX applications

This paper presents design, analysis, proposed fabrication process and simulation of a novel direct-contact (dc) RF-MEMS switch specified for WiMAX applications. The proposed MEMS switch will be used to switch the RF signal in the frequency range between 2GHz and 6GHz across a CPW transmission line. The switch has two large electrode plates to achieve low actuation voltage. The actuation voltage of the switch is 1.3V that make it compatible with CMOS circuits. The proposed structure provides excellent RF characteristics (Isolation −35dB at 10GHz and Insertion Loss −0.16dB at 10GHz). Considering the limitations of Urmia Micromachine Research Center, a verified fabrication process has been proposed.