Effect of UV light on the bending properties of a piezoresistive microcantilever

In the present work, bending properties of a commercial piezo resistive cantilever when exposed to Ultra Violet (UV) output which is proportional to the bending of the cantilever has two distinctive features viz., a near instantaneous response light is studied. When exposed to UV light of wavelength 365nm, the bridge immediately after switching on the UV, and a slow response followed by it. These are explained on the basis of photo induced stress and thermal process.