Short-term repeatability of a rad-hard EPI diode applied in electron processing dosimetry

The rad-hard EPI diode was characterized envisaging its application in on-line 1.5 MeV electron beam dosimetry in radiation processing. As expected from a current sensitivity loss (13.5%) to the accumulated dose up to 750 kGy, the EPI diode exhibited good short-term repeatability (CV = 1.9%) which is better than that required for CTA dosimeters, routinely applied in radiation processing. The dose-response curve of the EPI diode was fitted by a second order polynomial function for doses up to 775 kGy. In addition, some preliminary studies on the radiation damage effects induced in this diode using a Capacitance Deep Level Transient Fourier Spectroscopy system are presented. The results showed that up to almost 1.5 MGy only 3 defects (VO, V
2
and C
i
O
i
) can influence the carrier lifetime and current generated. Further radiation damage studies are under way.