High resolution analysis of self assembled Cu nanowires on vicinal Si(001)

This paper presents material properties of self-assembled Cu nanowires that were fabricated in the vacuum e-beam evaporation method. Diffraction patterns obtained from the Transmission Electron Microscopy (TEM) indicate that the Cu nanowires have two slightly different properties: single crystalline structures and polycrystalline structures with low angle grain boundary. Focused ion beam (FIB) was also used to observe the nanowires cross sectional shape.