Electron Rutherford back scattering spectroscopy with energy and angular scanning for thin oxide films diagnostics

Electron Rutherford back scattering spectroscopy (ERBS) is a perspective method for determining composition of thin nano-layers. Modern level of electron energy analysers allows achieving spectrums with energy resolution better than 0.03 eV at electron beam energy up to 15 keV. Clean aluminium sample has been exposed to air to achieve oxidized layer that was cleaned by the ion gun. ERBS spectrums were measured with hemispherical energy analyser at different electron energies. This in-situ technique has been used to get depth composition and to construct complex morphology of the oxide layer.