Fabrication of a MZI device based on waveguides of SiN for biological detection

In this work an integrated MZI configuration-based optical biosensor has been developed. This was obtained by PECVD with a waveguide of silicon nitride film. The silicon nitride film has similar properties to the films obtained with LPCVD. The device structure is simple and meets the requirements of a low temperature of fabrication for silicon technology, offering the possibility to have an integrated optical system. The results of the characterization of the device have showed that this could be important for future biological or chemical sensor.