Gallium nitride-on-silicon micromechanical overtone resonators and filters

In this paper, for the first time, we report on high-performance GaN-on-silicon micromechanical resonators and filters. A GaN-on-silicon resonator is reported which exhibits a quality factor of 1850 at 802.5 MHz, resulting in an f×Q value twice the highest reported for GaN-based resonators to date. The effective coupling coefficient for the GaN resonator is extracted to be 1.7%, which is among the best reported in the literature.