Local electromagnetic coupling with CMOS integrated circuits

This paper gives experimental evidences of how a local electromagnetic coupling can be created between a micro-antenna and the buried Power Ground Network (PGN) of a 350nm VLSI circuit; the PGN being integrated in Metal 1, the deepest metal layer available in the considered technology. The local EM injection method applied to create this coupling is introduced in this paper even if it presents some similarities with direct power injection.