Microcantilever array sensors with integrated PDMS microfluidics

We recently developed a new in-plane photonic transduction method for simultaneous readout of microcantilevers in an array on a single chip. Here we describe scale-up of array size to 64 microcantilevers (MCLs) and integration of polydimethylsiloxane (PDMS) microfluidics with chips including multiple MCL arrays. We illustrate biosensing with biotin/streptavidin as a model system, and demonstrate an integrated on-chip pump with a MCL array.