Behavioural modelling of MEMS oscillators and phase noise simulation

MEMS oscillators offer interesting prospects in terms of performance. Behavioural modelling in Verilog-A and phase noise simulation can help improving the current performances. The proposed macro-model permits multi-physic simulations including mechanical, piezoelectric and electrical analytic descriptions. Phase noise analysis are then performed with this model and compared to the standard Leeson phase noise calculation.