Planar terahertz circuits using thin dielectric waveguides

In this paper, the use of polymer-ceramic nanocomposites in the fabrication of THz planar circuits at the wafer-level is introduced. Thin ribbon dielectric waveguides (50~60μm) made from SU-8 - Barium Titanate (BaTiO
₃
) composites are used in the fabrication of THz ribbon waveguides and circuits. Details of material characteristics, fabrication process and an example power splitter circuit are presented.