3D UV-LIGA microfabricated circuits for a wideband 50W G-band serpentine waveguide amplifier

A wideband 220 GHz vacuum electronic amplifier is under development utilizing a novel method to fabricate 3D structures comprised of polymer monofilaments to form the beam tunnels and SU-8 to form the electromagnetic circuits. The complete structures are simultaneously formed in one UV-LIGA step. The method shows promise for THz VE microfabrication.