Efficient simulation for silicon-on-insulator waveguide electro-optic devices

This paper simulates the modulation efficiency and response time of free-carrier dispersion (FCD) effect on silicon-on-insulator (SOI) waveguide electro-optic (EO) devices using professional software called MEDICI. The dependence of free-carrier concentration on the applied voltage and device parameters and the corresponding response time are obtained, typically supporting a ~10
¹⁹
cm
^-3
concentration variation and a 10-30ns response time at 1.5-2.0V voltage.