The fabrication of array wind speed and direction sensor based on Pt film

In order to meet the measurement requirements of the two-dimensional flow field in small-scale space, a new hot film wind speed and direction sensor based on Pt film is designed in this paper. The figure of array sensor is formed by magnetron sputtering and mechanical mask, whose process is simple and has good consistensy; the insulation groove is formed by micromachining technology, which can reduce the interaction between the heating elements and thermosensitive elements, so the power consumption is reduced, and the sensitivity is improved, the measurement of low wind speed is achieved.