Non-electrical-contact LSI failure analysis using non-bias laser terahertz emission microscope

We have developed the laser terahertz emission microscope that does not require Vdd-biasing and signal input: NB (non-bias)-LTEM. The NB-LTEM, also, does not require signal output via electrodes. In this paper, first of all, the position of non-electrical contact tools, in failure analysis, is show. Secondary, the basic concept and the system schematic of the NB-LTEM are described. Thirdly, how to use the NB-LTEM in fault localization is explained. Then, some examples of fault localization or defect detection using the NB-LTEM are shown. Finally, we would like to compare the NB-LTEM and the other non-electrical contact tool (L-SQ, laser SQUID microscope).