The influence of nitrogen pressure on the microstructure and mechanical properties of TiSiN coatings by cathodic arc ion-plating

TiSiN nanocomposite Alms have been deposited on YT15 cemented carbide by a cathodic arc plasma plating system. Structure, mechanical and tribological properties were investigated by X-ray diffraction, Scanning electron microscope, tribometry, Profiler and Vickers indentation techniques, systemically. The results show that TiSiN films are the typical structure of TiN crystal inserted in amorphous Si
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N
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The maximum microhardness is about 4200 HV at 4Pa while the wear property is the best at the pressure of 2 Pa, with an average friction coefficient of 0.54.