A micro-resonator for fundamental physics experiments and its possible interest for time and frequency applications

A dedicated micro-resonator in a length-extension mode (LEM) has been developing for fundamental physics experiments, aiming to detect the quantum ground state of a resonator. The experiment is based on a high frequency, high quality factor and low mass micro-resonator, implemented in a high finesse Fabry-Perot cavity at cryogenic temperature. Very interesting preliminary measurements have been obtained on a 3.9 MHz, 25 μg resonator, given a 1.95 million quality factor, at room temperature and under a 5 10
^-2
mbar vacuum. By its planar configuration compatible with collective etching process, this resonator should also find interesting applications in the field of ultra stable oscillator (USO) and future quartz-MEMS USO.