Terahertz micromachined on-wafer probes: Repeatability and robustness

Although progress has been made in the development of submillimeter-wave monolithic integrated circuits, the evaluation of these circuits still relies on test fixtures, which makes testing expensive and time consuming. Based on a W-band prototype, a micromachined on-wafer probe covering frequencies 500-750 GHz is built to simplify submillimeter-wave integrated circuits testing. This paper demonstrates the repeatability and the robustness of this terahertz micromachined on-wafer probe.