Electret based energy harvester using a shared si electrode

In this study, an electret based energy harvester with a single silicon structure that shares harvesting counter electrodes and charging grid is demonstrated. The shared electrode provide the batch fabrication process that can avoid the charge leakage from the charged electret. The mass structure supported by the thin Si spring has resonant frequency of 40 Hz. The harvesting demonstration showed the 0.23 µW at 10 Hz, 0.1 G with load resistance of 1 MΩ.