Technology and characteristics of microhumidity sensors

Operation principle of the microhumidity sensors is based on a relationship between a capacity of doped silica film and an amount of humidity that sorbed by it. Characteristics of the films that were produced by a hydrolytic polycondensation from tetraethylorthosilicate based solutions were studied. Influence of technological factors on formation and sensitivity of the films was determined. High sensitivity enables to use the sensors to measure humidity content for especially pure gases, used in microelectronic technology, active gases at humidity content up to 193 K by dew point and organic solvents.