Effect of deposition temperature of amorphous carbon thin films

The work presented here shows the effect of deposition temperature on amorphous carbon (a-C) thin films. The a-C thin film were deposited on glass substrate by pyrolysing camphor oil at various temperature using the Chemical Vapor Deposition (CVD) technique. The films were prepared at various deposition temperature ranging from 350°C to 500°C. The electrical, optical and structural properties were characterized by current-voltage (I-V) Measurement, UV-VIS-NIR Spectrophotometer and Atomic Force Microscopy (AFM) respectively. As the deposition temperature increase, the conductivity increased but the optical band gap decrease from 1.5eV to 0.5eV due to the formation of more sp
²
bonded carbon configuration.