Nanomechanically Tunable Photonic Crystal Resonators Utilizing Triple-Beam Coupled Nanocavities

We present our results on the design, fabrication, and characterization of a tunable photonic crystal (PhC) resonator through utilization of triple-beam coupled nanocavities driven by an on-chip integrated nanomechanical system. Our experiments demonstrated that we are able to achieve up to 24-nm spectral tunability with minimal degradation of
Q
by accurate control of both perturbing nanoresonators. We have also validated our experimental results through three-dimensional (3-D) finite-difference time-domain (FDTD) simulations and shown good agreement with measured results.