Variability and feasibility of CVD graphene interconnect

Graphene and its derivatives (graphite, CNT) have very high conductivity and critical current density higher than 10
⁸
A/cm
²
, which can be utilized in interconnect applications. Theoretically, a doped graphene is predicted to have better performance than Cu as an interconnect conductor. However, the feasibility of graphene interconnect has not been experimentally examined systematically. In this paper, the critical current density of single layer and multilayer graphene are studied to provide insights about the feasibility of graphene interconnect technology.