Apply neighborhood search on optimization heuristic for scheduling of foundry fabrication

Wafer fabrication is the most complex process in Semiconductor Manufacturing Industry that includes the reentrant events, process queue time and lot-tool dispatching. A scheduling approach solves the problem by automated assigning of resources/tools to lots in order to process them in an optimized way. The paper demonstrates a feasible scheduling methodology applying on fabrication optimization through Multi-Direction neighborhood search algorithm (MDNS). By applying on implanter tools, the productivity improved by 2∼3% and reduced inefficient transportation volume around 35%.