Fast and robust cantilever switch with suppressed bouncing for ic applications

This paper reports a cantilever switch which provides fast switching and robustness using extended gate electrode and unique dimple structure. The gate electrode extended along the length of the beam enabling higher holding force at the moment of the contact, which facilitated the suppression of the dynamic bouncing. The dimple structure was also introduced along the beam's length preventing the beam from collapsing to the gate electrode. Through these considerations on the switch design, the switching time of the conventional switch was reduced to 60 % of the conventional one's. Also, the proposed switch was observed to endure over 1.5 times of its pull-in voltage.