Integrated total-NOx-evaluation-chip for simultaneous conversion and detection of NOx in air

An integrated Total-NO
_x
-Evaluation-Chip (TNEC) is being proposed for real-time and point-of-interest evaluation of total NO
_x
in air. It consists of a Micro-Electric-NO
_x
-Converter (μENC) and a Thermoelectric-Gas-Sensor(TGS). In the μENC, the NO
_x
is treated with a corona-discharge. Then, in the TGS, the treated NO
_x
is detected by using a catalytic reaction and a thermoelectric effect. The fabricated TNEC electrically converted NO
_x
mixture from various mixing-rates to a fixed-mixing-rate of about 25%, and detected it with the sensitivity of 4.65×10
^-2
μV/ppm.