Fabrication and properties of 3D flexible parylene-based microelectrode array with silicon tips

We have developed and characterized a novel 3D flexible parylene-based microelectrode array (MEA) with silicon tips, which combines advantages of the rigid 3d electrode and the flexible substrate. The impedance of solid 3D MEA in PBS solution is smaller than that of the planar and hollow 3D MEA. Further tests indicate that the solid 3D MEA has better penetrating performance, and retains previous structure and profile without observable damage after penetration.